Economically and Environmentally Responsible Synthesis of Silane Gas for Use in High-Purity Silicon Production
Motivation
- Silane gas is the primary precursor for all silicon based devices.
- Current synthesis method is very dangerous, costly and toxic involving large amounts of boiling chlorine.
Approach
- Using advanced processes, silane is directly synthesized using only a silicon source, hydrogen, and electricity in the EDA Reaction Cell.
Results
- Pilot reactor currently under construction