Advanced Plasma Diagnostics
Diagnostics Automation
Motivation
- Need for automated three-dimensional probe translation in sealed chamber
- Need for software to integrate seamlessly with probe operation and diagnostics software for full experiment automation
- Need to accurately measure plasma density and temperature in high pressure and voltage regimes
Approach
- Customized design of 3D translation system for customer chamber geometry
- Use of a Langmuir probe with high pressure model
- Verify measurements using hairpin resonance probe
- Measures density using completely different technique
Results
- Hardware and custom software assembled and tested at EDA facility
- Final systems installed by EDA at customer facility
Plasma Source Transient Analysis
